Abstract: In order to explore sterilization effect and mechanism of microwave treatment on molds in maize, response surface methodo Lgy was used to optimize sterilization process for Aspergillus funigatus in maize by microwave irradiation. And effects of microwave power and time on Lg reduction period of Aspergillus funigatus spores in maize were studied specifically. Then corresponding inactivation kinetic models were established. The optimal sterilization conditions of Aspergillus funigatus by microwave irradiation were determined as follows:microwave doses of 2.5W/g, microwave power of 539 W. Under these conditions, Lg reduction of CFU of Aspergillus funigatus spores was 1.0496. And weibull model could better predict and fit inactivation effects of Aspergillus funigatus spores by microwave processing than linear one.