Abstract: High-voltage Pulsed Electric Field (Pulsed Electric Field, PEF) sterilization is one of the most popular non-thermal sterilization technologies.This paper analysised the sterilization energy, concluded that large ratio of the treatment chamber resistance and total resistance can guarantee the treatment chamber with high pulse energy and shorter pulse rising time.Results of PEF system experiments showed that the co-axial treatment chamber has better sterilization effect, when the PEF sterilization system applied the same voltage.Co-axial treatment chamber showed that due to the fluid performance better, it had more advantages in handling the low conductivity of materials, and the co-field treatment chamber was more suitable for high conductivity materials.Research results of this paper had important significance to the structure design of co-linear or co-field treatment chamber and the optimization of the high-voltage pulsed electric field system.